Presentation
Lightning Talk: Lithography and advanced technologies work together to deliver the foundry's needs
DescriptionTo satisfy the IC industry pursuing Moose's Law in decades, the foundry is chasing to reduce the light wavelength to deliver the IC industry's goal. Coupled with every effort to search for a shorter light wavelength, several new technologies were developed to either help prolong the life of the current light wavelength or make the next wavelength adapted quickly. This talk will cover the history of light wavelength improvement and advanced technologies. Then it will review several current industry technologies trends that more researchers might need to work on.
Event Type
Research Manuscript
TimeWednesday, July 12th1:30pm - 1:40pm PDT
Location3008, 3rd Floor
EDA
Design for Manufacturing and Reliability