Presentation
Graph-Based Simultaneous Placement and Routing for Two-Dimensional Directed Self-Assembly Technology
DescriptionTwo-dimensional directed self-assembly (2D-DSA) is an emerging lithography technology for advanced process nodes. We can determine the orientations of double posts to guide block copolymers to form feasible 2D guiding template patterns by the 2D-DSA process. This paper presents the first work to handle the 2D-DSA simultaneous placement and routing problem. We propose a novel graph to model feasible guiding templates, a broadcast-based algorithm for placement and routing, and a strongly effective region property to minimize the cuts. Experimental results show that our algorithm can efficiently generate a 2D-DSA placement and routing solution with high routability and low cut numbers.
Event Type
Research Manuscript
TimeWednesday, July 12th2:10pm - 2:25pm PDT
Location3008, 3rd Floor
EDA
Design for Manufacturing and Reliability